| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a micro-actuator having a movable portion composed of a magnetic amorphous metal. <P>SOLUTION: This micro-actuator 2 includes: a base 210 having a recessed part 211 of hollowing out a part on the surface side; the movable portion 230 rotatable in the recessed portion 211; a pair of torsion bars 220 and 220 arranged on a virtual straight line in the recessed portion 211, having one end part fixed to the base 210 and having the another end part fixed to the base of the movable portion 230; and a driving portion 240 for giving rotating force to the movable portion 230. Here, the movable portion 230 is formed wider than a width of the torsion bars 220 and 220, the pair of torsion bars 220 and the movable portion 230 are made of magnetic amorphous metals, and the driving portion 240 forms a magnetic field to the movable portion 230, so that the movable portion 230 rotates. <P>COPYRIGHT: (C)2013,JPO&INPIT |
