| 摘要 |
<p>A method for cleaning a mold with a mold-releasing layer, said mold being obtained by providing a mold (30), which is used for the purpose of transferring a predetermined pattern to a transfer-receiving object by imprinting, with a mold-releasing layer (31). The mold-releasing layer (31) is formed of a fluorine compound. The method for cleaning a mold with a mold-releasing layer comprises: an ultraviolet light irradiation step wherein the mold-releasing layer (31) of the mold with a mold-releasing layer is irradiated with ultraviolet light; and a cleaning step wherein the mold-releasing layer, which has been chemically modified by the ultraviolet light irradiation step, is cleaned and removed. In the ultraviolet light irradiation step, the cumulative irradiation energy of ultraviolet light is set to 5,000-7,000 mJ/cm2 when the center wavelength of the ultraviolet light source is 150-200 nm.</p> |
