METHOD FOR FORMING TRANSPARENT GAS BARRIER LAYER, TRANSPARENT GAS BARRIER LAYER, TRANSPARENT GAS BARRIER FILM, ORGANIC ELECTROLUMINESCENT ELEMENT, SOLAR CELL, AND THIN FILM BATTERY

摘要

PROBLEM TO BE SOLVED: To provide a method for forming a transparent gas barrier layer, by which a transparent gas barrier layer having excellent gas barrier property even in a single layer, high transparency and very low internal stress can be formed without heating at high temperature.

SOLUTION: In a method for forming a transparent gas barrier layer by means of a sputtering method, a target including at least one carbide selected from a metal carbide and a metalloid carbide is used, and hydrogen-containing gas is used as reaction gas.

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