| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a focal point maintenance device configured to reduce affection of stray light by monitoring the stray light and performing a signal processing when maintaining and controlling a focal point, and a microscope device. <P>SOLUTION: A focal point maintenance device 10 used for a microscope device 40 comprises: a light source 20 for emitting focus light; a line sensor 50 for detecting the focus light and outputting a detection signal; a focus optical system 30 for irradiating a specimen with the focus light via an objective lens 41 and guiding the focus light reflected by the specimen to the line sensor 50; and a control part 60 for maintaining a focal plane of the objective lens 41 at a prescribed position of the specimen by changing the relative positional relation between the objective lens 41 and the specimen based on the detection signal calibrated by a calibration signal in the state that the focus light emitted from the objective lens 41 is not made incident again to the objective lens 41. <P>COPYRIGHT: (C)2013,JPO&INPIT |
