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发明名称
DOUBLE VACUUM PUMP APPARATUS, GAS PURIFICATION SYSTEM PROVIDED WITH DOUBLE VACUUM PUMP APPARATUS, AND EXHAUST GAS VIBRATION SUPPRESSING DEVICE IN DOUBLE VACUUM PUMP APPARATUS
摘要
申请公布号
KR20120120256(A)
申请公布日期
2012.11.01
申请号
KR20127019512
申请日期
2010.12.22
申请人
发明人
分类号
B01D53/047;B01D53/73;B01D53/96;F04B39/16
主分类号
B01D53/047
代理机构
代理人
主权项
地址
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