| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a device and a method for processing an object to be processed, such as a sample, a probe, a sample stand, without requiring a high device operation skill. <P>SOLUTION: At first, the shape generation processing for determining the shape of an object to be processed based on the scanning signal of an ion beam and the absorption current of the object to be processed is performed, and then the processing pattern arrangement processing for arranging a processing pattern on the image of the object to be processed is performed. Furthermore, the ion beam stop processing for stopping ion beam irradiation is performed while the object to be processed is processed by ion beam irradiation based on the comparison results of the image of the object to be processed and the processing pattern. <P>COPYRIGHT: (C)2013,JPO&INPIT |
