METHOD FOR MANUFACTURING SUBSTRATE OF PHOTOVOLTAIC MODULE

摘要

PURPOSE: A substrate manufacturing method for photocell module is provided to increase a haze value while maintaining high optical characteristic in a map. CONSTITUTION: A zinc oxide film layer is formed on a transparent substrate. A dopant is doped on the zinc oxide film layer. A surface structure of the zinc oxide film layer is controlled through etching by hydrogen plasma. The hydrogen plasma forms a hydrogen passivation film on the zinc oxide film layer. The doping quantity of the dopant is doped in the range of 0.1wt.% and 0.5wt.% of the zinc oxide.