METHOD TO MANUFACTURE METAL MASTER MOLD AND MASTER MOLD MADE BY THE SAME

摘要

PURPOSE: A manufacturing method of a metallic master mold and the metallic master mold manufactured by the same are provided to improve productivity and reduce the possibility of failures. CONSTITUTION: A manufacturing method of a metallic master mold includes the following steps: a seed metallic layer(3) is deposited on a substrate(1); a wafer(5) is bonded on the seed metallic layer; the wafer is exposed using a photo-mask; the exposed part of the wafer is removed by an etching operation; and a metallic pattern part(7) is formed at the wafer removed part by an electroplating operation; and the remaining part of the wafer is removed by a stripping operation.