发明名称 Optical member, method of manufacturing the same, and optical system using the same
摘要 An optical member comprises a substrate, an intermediate layer and an aluminum oxide layer stacked on the intermediate layer. The aluminum oxide layer has a surface with an irregular structure made of aluminum oxide crystals. The intermediate layer includes multiple columnar structures which are inclined with respect to a surface of the substrate, and the intermediate layer includes voids between the multiple columnar structures. A method of manufacturing an optical member comprising a substrate, an intermediate layer, and an aluminum oxide layer stacked on the intermediate layer and having a surface with an irregular structure made of aluminum oxide crystals comprises obliquely depositing an evaporating material on the substrate to form the intermediate layer, forming a film containing aluminum on the intermediate layer, and subjecting the film to hot water treatment to form on a surface of the film an aluminum oxide layer having the irregular structure made of aluminum oxide crystals.
申请公布号 EP2490048(A3) 申请公布日期 2012.10.31
申请号 EP20120001667 申请日期 2012.02.10
申请人 CANON KABUSHIKI KAISHA 发明人 SAKAI, AKIRA;MAKINO, KENJI
分类号 G02B1/11 主分类号 G02B1/11
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