METHOD AND SYSTEM TO CONTROL MOVEMENT OF A BODY FOR NANO-SCALE MANUFACTURING

摘要

The present invention is directed towards a method and system of controlling movement of a body coupled to an actuation system that features translating movement of the body in a plane extending by imparting angular motion in the actuation system with respect to two spaced-apart axes. Specifically, rotational motion is generated in two spaced-apart planes, one of which extending parallel to the plane in which the body translates. This facilitates proper orientation of body with respect to a surface spaced-apart therefrom.