<p>PURPOSE: A capacitor having high reliability is provided to increase effective area which a capacitor generates capacitance. CONSTITUTION: A first conductive pattern(122) is arranged between first and second electrodes(100,140). The first conductive pattern includes a closed loop on a plane. A second conductive pattern(124) is arranged inside an internal space. A first contact plug(154) penetrates the second conductive pattern. The first contact plug contacts the first and second electrodes.</p>
申请公布号
KR20120119280(A)
申请公布日期
2012.10.31
申请号
KR20110037097
申请日期
2011.04.21
申请人
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE;KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY
发明人
KIM, CHANG SUN;CHOI, SEONG HOON;PARK, JANG HYUN;RYU, SEUNG TAK;SUNG, BA RO SAIM;JO, DONG SHIN