REMOTE CONTROLLER FOR CRITICAL DIMENSTION SCANNING ELECTRON MICROSCOPE

摘要

PURPOSE: A remote control device of a CD-SEM(Critical Dimension Scanning Electron Microscope) is provided to precisely control an SEM at a remote site using an input unit. CONSTITUTION: A KVM(Keyboard Video Mouse Switch) module(230) is connected to a display connector of an SEM. An SEM controller comprises an SEM interface module(220). The SEM interface module rotates angle of an SEM internal reflector at an X-axis and a Y-axis. An IP controller(210) transfers an SEM status signal received from the SEM interface module to a remote controlling device. A beam button and a stage button are pressed down and create an electric signal. An input unit comprises the beam button and the stage button. [Reference numerals] (210) IP controller; (220) SEM interface module; (230) KVM module; (240) Image distributor; (250) Scaling module; (260) Signal converter module; (270) DVR; (280) HD camera