Method and system for generating electromagnetic radiation

摘要

Method of generating electromagnetic radiation having a wavelength in the ultraviolet range, comprising: generating at least one liquid and/or solid particle that comprises an excitable material; moving the at least one particle in an irradiation region of a first radiation beam; and irradiating the at least one particle by means of the first radiation beam, for exciting the excitable material comprised by the at least one particle and thereby generating the electromagnetic radiation. Generating the at least one particle comprises: providing a donor structure comprising at least a substrate and a donor layer, which donor layer comprises the excitable material; and irradiating the donor structure by means of a pulse of a second radiation beam causing release of a portion of the donor layer, said released portion forming the at least one particle.