METHOD FOR MONITORING THE AMOUNT OF CONTAMINATION IMPARTED INTO SEMICONDUCTOR WAFERS DURING WAFER PROCESSING,申请号EP20100813030-传众专利搜索

首页产品黄页商标征信

会员服务注册登录

法人/股东/高管

发明名称	METHOD FOR MONITORING THE AMOUNT OF CONTAMINATION IMPARTED INTO SEMICONDUCTOR WAFERS DURING WAFER PROCESSING
摘要
申请公布号	EP2517234(A2)	申请公布日期	2012.10.31
申请号	EP20100813030	申请日期	2010.12.17
申请人	MEMC ELECTRONIC MATERIALS, INC.	发明人	LIBBERT, JEFFREY, L.;FEI, LU
分类号	H01L21/66	主分类号	H01L21/66
代理机构		代理人
主权项
地址

您可能感兴趣的专利

Process for producing concentrated liquid detergents containing magnesium alkylbenzene sulfonic acid and alkanolamide.

Rope-shaped wound dressing.

Nitrogen-containing tetracyclic compounds having anti-allergic and anti-asthmatic activities, their preparation and use.

FILTRO DE MATERIAL NAO-TECIDO E PROCESSO DE PRODUCAO

INSTRUMENTO CLINICO PARA APLICACAO EM TECIDO OU EM MATERIAL ASSOCIADO A TECIDO E CABO PARA INSTRUMENTO CLINICO

METODO CONTINUO PARA PREPARAR ACIDO FOSFORICO Y SULFATO DE CALCIO

BUILDING MATERIAL

BUILDING MATERIAL HAVING INSULATING PROPERTIES

FRAGMENTADORA DE DOCUMENTOS

MEJORAS EN INTERCAMBIADOR DE CALOR DE TUBOS Y ALETAS Y METODO Y APARATO PARA HACERLO

ANORDNING TIL FREMSTILLING AV BOREHULL MED UNDERSKJAERING

OPTICAL PROJECTION EXPOSURE METHOD AND SYSTEM USING THE SAME

AROMATISATION NATURELLE DE PRODUITS POUR L'HYGIENE PERSONELLE.

RADIO-FREQUENCY POWER AMPLIFIER DEVICE

Attachment system for partitions with a view to forming a cabin. Many cabinscan be joined together to form a sanitation block.

ESTRUCTURAS COMPUESTAS DE FIBRA CONTINUA DE POLICARBONATO, Y PRECURSORES DE LAS MISMAS

MEJORAS EN TOLVA DE ALMACENAMIENTO DE TIPO VIBRATORIO, CON PLACAS DESVIADORAS INTERNAS Y FONDO DE PERFIL BAJO

METHOD FOR CONTROLLING ACTIVE SUSPENSION SYSTEM ON THE BASIS OF ROTATIONAL MOTION MODEL

ADAPTIVE CHARGE PUMP FOR PHASE-LOCKED LOOPS

METHOD AND APPARATUS FOR RELIABLY DETECTING LIGHT BEAM IN THE PRESENCE OF UNDESIRABLE LIGHT, ESPECIALLY SUITABLE FOR SURVEYING INSTRUMENTS