| 摘要 |
With photodiode array 1, light-incident surface side recessed parts 7, formed by thinning from a light-incident surface side, are aligned in array form, and opposite surface side recessed parts 11, formed by the thinning of regions, corresponding to regions at which light-incident surface side recessed parts 7 are formed, from an opposite surface side with respect to the light-incident surface, are aligned in array form. By pn junctions 3 being formed at bottom parts of opposite surface side recessed parts 11, pn junction type photodiodes are aligned in array form. <IMAGE> |
