MANUFACTURING METHOD OF INSOLUBLE ELECTRODE AND MANUFACTURING DEVICE OF THE INSOLUBLE ELECTRODE

摘要

PURPOSE: A manufacturing method of an insoluble electrode and a coating device for the intermediate layer of the insoluble electrode are provided to accelerate alloying by using an arc source. CONSTITUTION: A manufacturing method of an insoluble electrode is passed through a substrate cleaning step(S120), an intermediate layer coating step for forming an alloy coating layer(S200), an illuminance control step for the intermediate layer(S300), and an coating step for an accelerant layer. A physical evaporation method for the intermediate layer coating step is performed through a sputtering and an arc-ion plating. [Reference numerals] (AA) Start; (BB) End; (S110) Step for etching a valve metal substrate; (S120) Step for cleaning a valve metal substrate; (S200) Step for forming an intermediate layer by laminating T_i and T_a on the valve metal substrate; (S300) Step for controlling the illuminance of the intermediate layer; (S400) Step for coating the intermediate layer with mixed oxide mixing T_r and T_a