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发明名称
摘要
申请公布号	JP5064119(B2)	申请公布日期	2012.10.31
申请号	JP20070151501	申请日期	2007.06.07
申请人		发明人
分类号	H01L21/3065;H01L21/205	主分类号	H01L21/3065
代理机构		代理人
主权项
地址

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