INERTIAL SENSOR AND MANUFACTURING METHOD OF THE SAME

摘要

PURPOSE: An inertial sensor and a manufacturing method thereof are provided to combine a sensor unit of the inertial sensor with a lower cap of the inertial sensor by using a silicon-direct bonding method. CONSTITUTION: A sensor unit(110) includes a driving unit(111), a flexible board unit(112), and a support body(113). The driving unit is installed on the flexible board unit. The support unit supports the driving unit floating. The support unit is formed of silicon. A lower cap(120) covers a lower part of the driving unit. The lower cap is formed of silicon. The lower cap and the sensor unit are combined by using a silicon-direct bonding method.