PROCESS FOR THE PRECISION-PROCESSING OF SUBSTRATES BY MEANS OF A LASER COUPLED INTO A LIQUID STREAM

摘要

Method for structuring a surface layer (9) on a substrate (8) comprises guiding a liquid jet (6) directed onto the surface layer over the regions of the layer to be removed. The liquid jet contains an etching liquid having a strongly etching action than the material of the surface layer. The surface layer is locally heated in the regions to be removed. An independent claim is also included for a device for carrying out the above process.