Electronic pH sensor die packaging and manufacturing method thereof

摘要

A pH sensor is provided, comprising a substrate (40) and an ion sensitive field effect transistor (ISFET) die (10) with an ion sensing part (12) that responds to pH, wherein the ISFET die (10) is located over the substrate (40). The pH sensor also comprises a protective layer (14) formed over a portion of an outer surface of the ISFET die (10). Further, the pH sensor comprises a cover member (90) mechanically coupled to the protective layer, wherein the cover member (90) houses the ISFET die (10) and the substrate (40), and wherein the cover member (90) defines an opening (92) proximate to the ion sensing part (12).