发明名称 Method for determining a reconstructed image using a particle-optical apparatus
摘要 <p>A method for determining a reconstructed image using a particle-optical apparatus is described. The method comprises receiving (60) the plurality of pixel signals, determining (70) a reconstructed image from using Viterbi Detection on the plurality of pixel signals, the Viterbi Detection using a plurality of different states corresponding to a plurality of configurations of particles incident on the detector, and at least two states of the plurality of different states corresponding to a same, non-zero multiplicity of incident particles on a single pixel of the plurality of pixel signals.</p>
申请公布号 EP2518687(A1) 申请公布日期 2012.10.31
申请号 EP20110163633 申请日期 2011.04.26
申请人 FEI COMPANY 发明人 KUIJPER, MAARTEN
分类号 G06T5/00;G06T5/50;H01J37/22;H01J37/26 主分类号 G06T5/00
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