Interferometric pressure transducer for oil production industry, has separation membrane chamber that is connected with transducer chamber through hydraulic path at which transfer fluid with specific temperature is filled

摘要

The transducer has a movable measuring membrane (11) that is made of silicon. A transparent counter portion (12) is arranged facing a metallic support structure (13). A separation membrane chamber is connected with a transducer chamber through a continuous hydraulic path. The distance between the measuring membrane and the separation membrane chamber is set to predetermined range. The transfer fluid with specific temperature and pressure is filled in the separation membrane chamber, the transducer chamber and the hydraulic path.