LASER BEAM PROJECT DEVICE

摘要

PURPOSE: A laser beam irradiating apparatus is provided to locate a slit unit in a front side of a substrate and to reduce dispersion effect by diffraction effect of a laser beam. CONSTITUTION: A pattern unit and an opening unit are defined in a stage(110). A laser generating unit(130) generates a laser beam. A laser irradiating unit(140) irradiates the laser beam. A slit unit(120) controls the length of the laser beam. A CCD camera(160) detects one or more align keys on a substrate(150). A control unit(170) controls to be located to the opening unit. [Reference numerals] (160) CCD camera; (170) Control unit