| 摘要 |
A fluid regulator that has excellent flow-rate-control response for not only pressure fluctuations at the primary side but also pressure fluctuations at the secondary side and that realizes highly accurate flow-rate control is provided. A fluid regulator 10 includes a first diaphragm chamber 16 in which a working force obtained from a gas, such as air, is received by a first diaphragm 14 to generate a force for adjusting a valve opening, a second diaphragm chamber 17 in which pressure fluctuations of a fluid introduced from a secondary side are received by a second diaphragm 15 to generate a force for adjusting the valve opening, a shaft 12 that receives the adjusting forces generated in the first diaphragm chamber 16 and the second diaphragm chamber 17 and slides in the shaft direction, a valve 13 that operates together with the shaft 12 to adjust the valve opening, a partition wall 11a that isolates the first diaphragm chamber 16 from the second diaphragm chamber 17 so as not to interfere with each other, and a bellows 22 that blocks the circulation of the fluid between the first diaphragm chamber 16 and the second diaphragm chamber 17. |
