发明名称 Phase change memory cell structures and methods
摘要 Phase change memory cell structures and methods are described herein. A number of methods of forming a phase change memory cell structure include forming a dielectric stack structure on a first electrode, wherein forming the dielectric stack structure includes creating a second region between a first region and a third region of the dielectric stack structure, the second region having a thermal conductivity different than a thermal conductivity of the first region and different than a thermal conductivity of the third region of the dielectric stack. One or more embodiments include forming a via through the first, second, and third regions of the dielectric stack structure, depositing a phase change material in the via, and forming a second electrode on the phase change material.
申请公布号 US8298938(B2) 申请公布日期 2012.10.30
申请号 US201213342172 申请日期 2012.01.02
申请人 QUICK TIMOTHY A.;MARSH EUGENE P.;GREELEY JOSEPH N.;MICRON TECHNOLOGY, INC. 发明人 QUICK TIMOTHY A.;MARSH EUGENE P.;GREELEY JOSEPH N.
分类号 H01L21/44 主分类号 H01L21/44
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