发明名称 |
Display device comprising an antioxidant film formed on a microcrystalline semiconductor film wherein the antioxidant film has a recessed portion overlapping a channel region |
摘要 |
It is an object to provide a manufacturing method by which display devices can be manufactured in quantity without degrading the characteristics of thin film transistors. In a display device including a thin film transistor in which a microcrystalline semiconductor film, a gate insulating film in contact with the microcrystalline semiconductor film, and a gate electrode overlap with each other, an antioxidant film is formed on a surface of the microcrystalline semiconductor film. The antioxidant film on the surface of the microcrystalline semiconductor film can prevent a surface of a microcrystal grain from being oxidized, thereby preventing the mobility of the thin film transistor from decreasing. |
申请公布号 |
US8300168(B2) |
申请公布日期 |
2012.10.30 |
申请号 |
US20080213105 |
申请日期 |
2008.06.13 |
申请人 |
YAMAZAKI SHUNPEI;ICHIJO MITSUHIRO;TANAKA TETSUHIRO;OHTSUKI TAKASHI;YASUMOTO SEIJI;OKAZAKI KENICHI;SEMICONDUCTOR ENERGY LABORATORY CO., LTD. |
发明人 |
YAMAZAKI SHUNPEI;ICHIJO MITSUHIRO;TANAKA TETSUHIRO;OHTSUKI TAKASHI;YASUMOTO SEIJI;OKAZAKI KENICHI |
分类号 |
G02F1/136;G02F1/1343 |
主分类号 |
G02F1/136 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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