发明名称 |
Compact thermally controlled thin film resistors utilizing substrate contacts and methods of manufacture |
摘要 |
A method of forming a semiconductor structure includes forming a resistor on an insulator layer over a substrate, and forming at least one dielectric layer over the resistor. The method also includes forming a substrate contact through the at least one dielectric layer, through the resistor, through the insulator layer, and into the substrate. The substrate contact comprises a high thermal conductivity material. |
申请公布号 |
US8298904(B2) |
申请公布日期 |
2012.10.30 |
申请号 |
US201113008465 |
申请日期 |
2011.01.18 |
申请人 |
LUKAITIS JOSEPH M.;RANKIN JED H.;ROBISON ROBERT R.;SLISHER DUSTIN K.;SULLIVAN TIMOTHY D.;INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
LUKAITIS JOSEPH M.;RANKIN JED H.;ROBISON ROBERT R.;SLISHER DUSTIN K.;SULLIVAN TIMOTHY D. |
分类号 |
H01L21/20 |
主分类号 |
H01L21/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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