发明名称 Method of transferring a circuit onto a ground plane
摘要 Method for forming a semi-conducting structure includes the formation of at least one part of a circuit or a component, in or on a superficial layer of a substrate, the substrate including a buried layer underneath the superficial layer, and an underlying layer serving as first support, a transfer of said substrate onto a handle substrate, and then an elimination of the first support, the formation of an electrically conducting or ground plane forming layer, on at least one part of said buried layer, the formation, on said electrically conducting or ground plane forming layer, of a bonding layer, a transfer of the structure obtained onto a second support and an elimination of said handle substrate.
申请公布号 US8298915(B2) 申请公布日期 2012.10.30
申请号 US20050793863 申请日期 2005.12.22
申请人 ASPAR BERNARD;S.O.I. TEC SILICON ON INSULATOR TECHNOLOGIES 发明人 ASPAR BERNARD
分类号 H01L21/46 主分类号 H01L21/46
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