发明名称 APPARATUS AND METHODS FOR SETTING UP OPTICAL INSPECTION PARAMETERS
摘要 <p>Provided are novel methods and systems for setting up ranges of optical inspection parameters. These ranges may be later used for inspection of photovoltaic cells for discoloration, for example. A set of values corresponding to an inspection parameter, such as hue, saturation, and intensity, is obtained from a set-up image. The image includes multiple set-up areas, e.g., a defined group of pixels, wherein each set-up area is assigned a corresponding value in the set. A test image is then constructed from multiple test areas that are also associated with the values in the set. Each test area is assigned a color from a set of user defined colors based on the corresponding value and user defined ranges. A user interface includes both a range diagram and test image, which are used to adjust the ranges in the diagram that result in modification of the test image.</p>
申请公布号 SG184169(A1) 申请公布日期 2012.10.30
申请号 SG20120069811 申请日期 2011.04.11
申请人 KLA-TENCOR CORPORATION 发明人 DE GREEVE, JOHAN;SWERTS, BENJAMIN
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