发明名称 |
Method and apparatus providing air-gap insulation between adjacent conductors using nanoparticles |
摘要 |
A semiconductor device and a method of forming it are disclosed in which at least two adjacent conductors have an air-gap insulator between them which is covered by nanoparticles of insulating material being a size which prevent the nanoparticles from substantially entering into the air-gap. |
申请公布号 |
US8298964(B2) |
申请公布日期 |
2012.10.30 |
申请号 |
US201113096052 |
申请日期 |
2011.04.28 |
申请人 |
SINHA NISHANT;SANDHU GURTEJ;GREELEY NEIL;SMYTHE JOHN;MICRON TECHNOLOGY, INC. |
发明人 |
SINHA NISHANT;SANDHU GURTEJ;GREELEY NEIL;SMYTHE JOHN |
分类号 |
H01L21/31 |
主分类号 |
H01L21/31 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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