发明名称 A CAPILLARY OUTOMATIC EXCHANGING SYSTEM
摘要 <p>PURPOSE: An automatic capillary exchange system is provided to improve reliability and reduce operation costs by automatically mounting and releasing a capillary. CONSTITUTION: A capillary loader unit includes a capillary clamper which moves on a main stage(120) in X, Y, and X axis directions. A clamping release unit(160) is installed on a sub stage(140). A first driving unit(210) reciprocates the main stage. A second driving unit(220) reciprocates the sub stage. A third driving unit(230) reciprocates a capillary loader unit in a Y axis.</p>
申请公布号 KR101195195(B1) 申请公布日期 2012.10.29
申请号 KR20110096293 申请日期 2011.09.23
申请人 IL WON CO., LTD. 发明人 CHOI, YOUNG KYU
分类号 H01L21/60 主分类号 H01L21/60
代理机构 代理人
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