发明名称 |
SCREEN MASK CLEANING APPARATUS AND CLEANING METHOD USING THE SAME |
摘要 |
PURPOSE: A screen mask cleaning apparatus for manufacturing an organic light emitting display device and a screen mask cleaning method using the same are provided to smoothly perform a cleaning operation by including a jig. CONSTITUTION: A cleaning unit(30) cleans a screen mask by injecting a jig to a cleaning bath. A first transfer unit is formed between a collection holder(10) and the cleaning unit. A second transfer unit(60) is formed in the cleaning unit. A third transfer unit(70) is formed between the cleaning unit and a discharge holder(40). The discharge holder holds the jig transferred to the third transfer unit.
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申请公布号 |
KR101195565(B1) |
申请公布日期 |
2012.10.29 |
申请号 |
KR20110123000 |
申请日期 |
2011.11.23 |
申请人 |
DEVICEENG |
发明人 |
CHOI, BONG JIN;BANG, IN HO;KIM, JU TAE |
分类号 |
H01L51/56 |
主分类号 |
H01L51/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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