发明名称 SCREEN MASK CLEANING APPARATUS AND CLEANING METHOD USING THE SAME
摘要 PURPOSE: A screen mask cleaning apparatus for manufacturing an organic light emitting display device and a screen mask cleaning method using the same are provided to smoothly perform a cleaning operation by including a jig. CONSTITUTION: A cleaning unit(30) cleans a screen mask by injecting a jig to a cleaning bath. A first transfer unit is formed between a collection holder(10) and the cleaning unit. A second transfer unit(60) is formed in the cleaning unit. A third transfer unit(70) is formed between the cleaning unit and a discharge holder(40). The discharge holder holds the jig transferred to the third transfer unit.
申请公布号 KR101195565(B1) 申请公布日期 2012.10.29
申请号 KR20110123000 申请日期 2011.11.23
申请人 DEVICEENG 发明人 CHOI, BONG JIN;BANG, IN HO;KIM, JU TAE
分类号 H01L51/56 主分类号 H01L51/56
代理机构 代理人
主权项
地址