PROBE USING NANOWIRE AND METHOD THEREFOR

摘要

PURPOSE: A probe using a nano wire and a manufacturing method therefor are provided to manufacture a probe using a single-crystal metal nano probe, thereby measuring electrical properties of the probe without damage on a surface of the probe. CONSTITUTION: Single-crystal metal nano wires(110) are formed on a substrate(100). A mother body(200) contacts the single-crystal metal nano wires. An electronic beam or an ion beam are irradiated onto a portion where the motor body contacts the single-crystal metal nano wires so that bonded mother body are bonded with the single-crystal metal nano wires. The mother body bonded with the single-crystal metal nano wires is separated from the substrate. [Reference numerals] (AA) Detaching from substrate