DEFECT CLASSIFICATION METHOD, AND DEFECT CLASSIFICATION SYSTEM

摘要

In automatic defect classification, a classification recipe must be set for each defect observation device because the suitable processing parameters for each device are different. If a plurality of devices operate at the same stage, the classification class in the classification recipes must be the same. Problems have arisen whereby differences occur in the classification class in different devices when a new classification recipe is created or similar situations. This defect classification system is provided with: a classification recipe storage unit (214) that stores classification recipes; an information specification unit (210) that specifies a classification recipe, the stage of a stored image, and device information; a corresponding defect specification unit (209) that specifies images of the same type of defect from images obtained from different image pickup devices at the same stage; an image conversion unit (212) that converts the images obtained from the different image pickup devices at the same stage into comparable similar images; and a recipe update unit (211) that defines the same classification classes for classification recipes in the same stage and that records the classification classes in the classification recipes corresponding to the specified images of the same type of defect.