LITHOGRAPHY SYSTEM FOR PROCESSING A TARGET, SUCH AS A WAFER, AND A METHOD FOR OPERATING A LITHOGRAPHY SYSTEM FOR PROCESSING A TARGET, SUCH AS A WAFER
摘要
The invention relates to a lithography system for processing a target, such as a wafer. The lithography system comprises a beam source arranged for providing a patterning beam, a final projection system arranged for projecting a pattern on the target surface, a chuck arranged for supporting the target and a mark position system connected to the final projection system and arranged for detecting a position mark on a surface.
申请公布号
WO2012144905(A2)
申请公布日期
2012.10.26
申请号
WO2012NL50272
申请日期
2012.04.23
申请人
MAPPER LITHOGRAPHY IP B.V.;VERGEER, NIELS;COUWELEERS, GODEFRIDUS CORNELIUS ANTONIUS;DE BOER, GUIDO;PLANDSOEN, LAURENS;VERBURG, COR
发明人
VERGEER, NIELS;COUWELEERS, GODEFRIDUS CORNELIUS ANTONIUS;DE BOER, GUIDO;PLANDSOEN, LAURENS;VERBURG, COR