FLOW-THROUGH EJECTION SYSTEM INCLUDING COMPLIANT MEMBRANE TRANSDUCER

摘要

A liquid dispenser (310) includes a substrate (339 ). A first portion of the substrate defines a liquid dispensing channel (312) including an outlet opening (326). A second portion of the substrate defines a liquid supply channel (311) and a liquid return channel (313). A liquid supply(324) provides a continuous flow of liquid from the liquid supply through the liquid supply channel through the liquid dispensing channel through the liquid return channel and back to the liquid supply. A diverter member (320), positioned on a wall (340) of the liquid dispensing channel that includes the outlet opening, is selectively actuatable to divert a portion of the liquid flowing through the liquid dispensing channel through outlet opening of the liquid dispensing channel. The diverter member includes a MEMS transducing member (120). A first portion of the MEMS transducing member is anchored to the wall of the liquid dispensing channel that includes the outlet opening. A second portion of the MEMS transducing member extends into a portion of the liquid dispensing channel that is adjacent to the outlet opening and is free to move relative to the outlet opening. A compliant membrane (130) is positioned in contact with the MEMS transducing member. A first portion of the compliant membrane separates the MEMS transducing member from the continuous flow of liquid through the liquid dispensing channel. A second portion of the compliant membrane is anchored to the wall of the liquid dispensing channel that includes the outlet opening.