发明名称 |
AN ARRANGEMENT FOR MANUFACTURING CRYSTALLINE SILICON INGOTS |
摘要 |
<p>The present invention relates to an arrangement for manufacturing of crystalline silicon ingots by directional solidification which comprises a furnace with a hot zone able to house at least one crucible and which is sealed against the ambient air atmosphere, where the hot zone comprises: i) heating means for heating the crucible, ii) an outlet for evacuating gas from the hot zone of the furnace, iii) an inlet for supplying purge gas, iv) a bottom support structure for carrying the crucible, v) a top-shield, vi) a circumferential support structure, and vii) a gas shield arrangement within the hot zone of the furnace, wherein the gas shield arrangement comprises: a circumferential frame structure with a flat horizontal planar upper surface facing the top shield, and which is placed on top of the circumferential support structure, and a circumferential hood attached to and extending downward from the top shield to a distance above the flat planar upper surface of the circumferential frame structure and thus forming a continuous slot along the periphery of the circumferential hood at a distance from the crucible wall, and the inlet for purge gas is positioned to supply purge gases under the hood.</p> |
申请公布号 |
WO2012143867(A1) |
申请公布日期 |
2012.10.26 |
申请号 |
WO2012IB51941 |
申请日期 |
2012.04.18 |
申请人 |
REC WAFER PTE. LTD.;VLADIMIROV, EGOR;TEIXEIRA, ALEXANDRE;JOHANSEN, KAI;HOMAYONIFAR, POURIA |
发明人 |
VLADIMIROV, EGOR;TEIXEIRA, ALEXANDRE;JOHANSEN, KAI;HOMAYONIFAR, POURIA |
分类号 |
C30B28/06;C30B29/06;C30B35/00 |
主分类号 |
C30B28/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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