IMPRINT APPARATUS

摘要

PURPOSE: An imprint device is provided to press a substrate and a stamp with uniform pressure over the front surface of the substrate as the substrate is placed on a flexible rubber pad heater. CONSTITUTION: An imprint device comprises a chamber unit(10), a stage, a stamp(20), and a driving unit(50). The stage comprises a base(31) and a rubber pad heater(32). The base is installed in chambers. The rubber pad heater is installed on the base, and generates heat by electric energy. A substrate(G) is placed on the rubber pad heater. The stamp is pressed to the substrate, and imprints patterns in a resin. The driving unit relatively moves the stage or the stamp in a vertical direction in order that the stage and the stamp are pressed or separated from each other.