发明名称 |
METHOD OF FORMING P-N JUNCTION IN SOLAR CELL SUBSTRATE |
摘要 |
<p>Embodiments of the present invention relate to a single step diffusion process used in selective emitter solar cell fabrication. In one embodiment, a dopant paste is selectively applied on a front surface of a substrate having opposite conductivity type from the dopant paste. The substrate is then exposed to a dopant containing vapor to deposit a doping layer having opposite conductivity type from the substrate on the front surface of the substrate. While the substrate is exposed to the dopant containing vapor, a portion of the dopant paste also contribute to deposition of the doping layer via gas phase transport of doping atoms from the dopant paste. The substrate is then heated in an atmosphere comprising oxygen and/or nitrogen to a temperature sufficient to cause the dopant atoms in the dopant paste and the doping layer to diffuse into the substrate, forming heavily and lightly doped emitter regions.</p> |
申请公布号 |
WO2012145060(A1) |
申请公布日期 |
2012.10.26 |
申请号 |
WO2012US25082 |
申请日期 |
2012.02.14 |
申请人 |
APPLIED MATERIALS, INC.;KUMAR, PRABHAT;DOMINGUEZ, JASON;TANNER, DAVID |
发明人 |
KUMAR, PRABHAT;DOMINGUEZ, JASON;TANNER, DAVID |
分类号 |
H01L31/06;H01L31/042;H01L31/18 |
主分类号 |
H01L31/06 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|