| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a magnetic recording medium capable of increasing usable frequency of a master information carrier that allows the master information carrier to be repeatedly transferred. <P>SOLUTION: A manufacturing method of a magnetic recording medium sequentially forms: an orientation control layer 3 for controlling orientations of at least a soft magnetic under layer 2 and a layer right above the soft magnetic under layer 2 on a non-magnetic substrate 1; and a perpendicular magnetic layer 4 in which an axis of easy magnetization is perpendicularly oriented with respect to the non-magnetic substrate 1. The manufacturing method of the magnetic recording medium forms the orientation control layer 3 by executing: a first depositing step of depositing a first orientation control layer 3a by using a target containing a CoCr alloy by means of a reactive sputtering method that uses a sputtering gas containing nitrogen; and a second depositing step of depositing a second orientation control layer 3b composed of Ru or an Ru alloy on the first orientation control layer 3a by using a sputtering method. <P>COPYRIGHT: (C)2013,JPO&INPIT |
