| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for storing pellicles, even in storing, transporting, and opening, being unlikely to generate dust and preventing contamination of a product stored in a bag, especially, the pellicle stored inside a pellicle case. <P>SOLUTION: The method for storing pellicles includes: putting the case storing the pellicle in a first bag for cleanliness specifications and closing its opening; putting it in a second bag with antistatic function and closing its opening; and further putting it in a third bag with the antistatic function and tightly sealing it. <P>COPYRIGHT: (C)2013,JPO&INPIT |
