| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a loading unit capable of suppressing substantial height by storing a lower end part of a substrate holding tool in a recess formed on the floor side. <P>SOLUTION: The loading unit is installed under a processing unit for applying heat treatment to substrates W, loads and unloads a substrate holding tool 58 holding the substrates W to/from the processing unit and transfers a substrate W to the substrate holding tool 58. The loading unit includes: a loading housing 72 connected to the processing unit so as to surround the whole loading unit; a lifting elevator mechanism 68 having a holding arm 82 for holding the lower part of the substrate holding tool 58 and allowing the substrate holding tool 58 to ascend and descent into/from the processing unit; a substrate transfer mechanism 74 for transferring the substrate W to the substrate holding tool 58; and a substrate holding tool housing recess 90 formed on the bottom of the loading housing 72 correspondingly to the lower part of the substrate holding tool 58 and projected downward so as to store the lower end part of the substrate holding tool 58. <P>COPYRIGHT: (C)2013,JPO&INPIT |
