| 摘要 |
A high-pressure fluid supply apparatus that avoids gas leakage due to a reduction in the performance of a seal member provided inside piping is provided. A high-pressure fluid supply apparatus is provided, the apparatus including: piping that supplies a fluid from a high-pressure fluid supply source to a fluid utilizing device via a first valve device and a second valve device; a seal member that is arranged at a pipe part between the first and second valve devices in order to maintain sealing property of the pipe part, the seal member being made of an elastic material; and a control unit that controls closing and opening of the first and second valve devices to be able to adjust a pressure variation rate of the fluid in the pipe part, wherein the control unit adjusts the pressure variation rate in accordance with a temperature of the seal member. |
