| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce a cost by controlling a forming position of a pattern in a drawing object by a simple configuration. <P>SOLUTION: In a pattern drawing device, a plurality of datum lines Lr that are fixedly formed on a stage 10 for supporting a substrate W are aligned in a sub-scanning direction X. A line camera 50 facing the datum lines Lr is provided with fixed relative positional relation with optical heads 42 and 43, and an image of the datum lines Lr is captured by the line camera 50. The configuration, in which the datum lines Lr aligned in the sub-scanning direction X is captured by the line camera 50, can control a position of a pattern to be formed on the substrate W in the sub-scanning direction by a simple configuration compared with the conventional technique using an encoder. Consequently, a cost can be reduced. <P>COPYRIGHT: (C)2013,JPO&INPIT |
