发明名称 SHEET STICKING DEVICE AND STICKING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a sheet sticking device and a sticking method that reduce mixing of an air bubble as much as possible. <P>SOLUTION: A sheet sticking device 1 includes delivery means 2 of delivering an adhesive sheet S, pressing means 3 of pressing the adhesive sheet S delivered from the delivery means 2 against an adherend surface W1 of an adherend W, and moving means 4 of relatively moving the adherend W and pressing means 3. The pressing means 3 is operative to perform first sticking operation to move relatively in a first direction in the adherend surface W1 by the moving means 4 while pressing the adhesive sheet S against the adherend surface W1 and second sticking operation to move relatively in a second direction in the adherend surface crossing the first direction by the moving means 4 while pressing the adhesive sheet S stuck in the first sticking operation against the adherend surface W1 with larger pressing force than the first sticking operation. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2012209303(A) 申请公布日期 2012.10.25
申请号 JP20110071692 申请日期 2011.03.29
申请人 LINTEC CORP 发明人 UEMICHI ATSUSHI;MENJU TOSHIAKI
分类号 H01L21/683 主分类号 H01L21/683
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