发明名称 |
Heated air mass WCSP package and method for accelerometer |
摘要 |
An inertial sensor (16) includes a differential thermocouple (13) including first (4A) and second (4B) metal traces, a poly trace (6) with a first end connected to a first end of the first metal trace to form a first (−) thermocouple junction and a second end connected to a first end of the second metal trace to form a second (+) thermocouple junction. A gas mass (10) located symmetrically with respect to the thermocouple junctions is heated by a heater (8). Acceleration or tilting of the sensor shifts the relative location of the gas mass relative to the thermocouple junctions, causing differential heating thereof and generation of a corresponding thermocouple output signal.
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申请公布号 |
US2012266672(A1) |
申请公布日期 |
2012.10.25 |
申请号 |
US201113066746 |
申请日期 |
2011.04.22 |
申请人 |
MEINEL WALTER B.;LAZAROV KALIN V.;TEXAS INSTRUMENTS INCORPORATED |
发明人 |
MEINEL WALTER B.;LAZAROV KALIN V. |
分类号 |
G01P15/02 |
主分类号 |
G01P15/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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