| 摘要 |
A method of making an array columnar hollow semiconductor structure includes: providing an oxide layer; placing a chromeless mask on the oxide layer, wherein the chromeless mask is a bank-shaped frame; forming a silicone nitride layer to cover the first partial top surface of the oxide layer and the whole outer surface of the bank-shaped frame; removing one part of the silicone nitride layer to expose a second partial top surface of the oxide layer and a top surface of the bank-shaped frame; removing the bank-shaped frame to expose a third partial top surface of the oxide layer; removing a first part of the oxide layer under the second partial top surface and a second portion of the oxide layer under the third partial top surface to form a plurality of columnar hollow bodies; and removing the other silicone nitride layer to completely expose the columnar hollow bodies. |
