| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an operation device of metering pump which does not require an electromagnetic valve for removing gas and air, moreover, prevents chemicals from being discharged to the outside the system and, at the same time, can perform transfer of the chemicals. <P>SOLUTION: The operation device of metering pump includes: a normal time driving means 21 for driving a metering pump 11 with a normal time stroke quantity which ejects moving fluid of a predetermined quantity; and a failure time driving means 22 for driving the metering pump 11 with a predetermined failure time stroke quantity larger than the normal time stroke quantity; wherein, when operating the metering pump for transferring moving fluid which easily generates gas, a starting control means 20 operates the failure time driving means 22 upon the starting of the metering pump and, thereafter, operates the normal time driving means 21. <P>COPYRIGHT: (C)2013,JPO&INPIT |
