发明名称 Mask Frame Assembly for Thin Film Deposition
摘要 A mask frame assembly for depositing a deposition material on a deposition substrate comprises a mask frame including an opening and frames surrounding the opening, and a mask coupled on the mask frame. A deformation prevention unit is formed on at least one region of the mask. Since the deformation prevention unit is formed on a peripheral portion of a deposition pattern in the mask, deformation of the mask in a vertical direction may be reduced. Accordingly, defective attaching of the mask to the substrate may be reduced.
申请公布号 US2012266813(A1) 申请公布日期 2012.10.25
申请号 US201113239689 申请日期 2011.09.22
申请人 HONG JEREMY;SAMSUNG MOBILE DISPLAY CO., LTD. 发明人 HONG JEREMY
分类号 B05C11/00 主分类号 B05C11/00
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