ENERGY HARVESTING USING MEMS COMPOSITE TRANSDUCER

摘要

A method of harvesting energy from the environment includes providing an energy harvesting device. The energy harvesting device includes a MEMS composite transducer. The MEMS composite transducer includes a substrate. Portions of the substrate define an outer boundary of a cavity. A MEMS transducing member includes a beam having a first end and a second end. The first end is anchored to the substrate and the second end cantilevers over the cavity. A compliant membrane is positioned in contact with the MEMS transducing member. A first portion of the compliant membrane covers the MEMS transducing member. A second portion of the compliant membrane is anchored to the substrate. The energy harvesting device is configured so that the compliant membrane is set into oscillation by excitations produced external to the energy harvesting device. The MEMS transducing member is caused to move into and out of the cavity by the oscillating compliant membrane. The motion of the MEMS transducing member is converted into an electrical signal.